JPH0481641B2 - - Google Patents

Info

Publication number
JPH0481641B2
JPH0481641B2 JP63290950A JP29095088A JPH0481641B2 JP H0481641 B2 JPH0481641 B2 JP H0481641B2 JP 63290950 A JP63290950 A JP 63290950A JP 29095088 A JP29095088 A JP 29095088A JP H0481641 B2 JPH0481641 B2 JP H0481641B2
Authority
JP
Japan
Prior art keywords
piezoelectric ceramic
electrostrictive element
ceramic member
nozzle
flapper mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63290950A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02138501A (ja
Inventor
Motonari Ikehata
Hiroyuki Mikami
Naoto Inayama
Katsuhiko Odajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP63290950A priority Critical patent/JPH02138501A/ja
Priority to US07/301,708 priority patent/US4934401A/en
Priority to GB8901966A priority patent/GB2225133B/en
Priority to FR8901109A priority patent/FR2639086B1/fr
Priority to DE3902738A priority patent/DE3902738C2/de
Priority to US07/507,879 priority patent/US5012835A/en
Publication of JPH02138501A publication Critical patent/JPH02138501A/ja
Priority to US07/645,632 priority patent/US5076314A/en
Publication of JPH0481641B2 publication Critical patent/JPH0481641B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005—Piezoelectric benders
    • F16K31/006—Piezoelectric benders having a free end
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00—Circuit elements having moving parts
    • F15C3/10—Circuit elements having moving parts using nozzles or jet pipes
    • F15C3/14—Circuit elements having moving parts using nozzles or jet pipes the jet the nozzle being intercepted by a flap
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2278—Pressure modulating relays or followers

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
JP63290950A 1988-11-17 1988-11-17 ノズルフラッパ機構 Granted JPH02138501A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP63290950A JPH02138501A (ja) 1988-11-17 1988-11-17 ノズルフラッパ機構
US07/301,708 US4934401A (en) 1988-11-17 1989-01-26 Nozzle flapper mechanism
GB8901966A GB2225133B (en) 1988-11-17 1989-01-30 Nozzle flapper mechanism
FR8901109A FR2639086B1 (fr) 1988-11-17 1989-01-30 Dispositif de clapet a lamelles pour buse ou orifice
DE3902738A DE3902738C2 (de) 1988-11-17 1989-01-31 Düsenklappenvorrichtung
US07/507,879 US5012835A (en) 1988-11-17 1990-04-12 Nozzle flapper mechanism
US07/645,632 US5076314A (en) 1988-11-17 1991-01-25 Nozzle flapper mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63290950A JPH02138501A (ja) 1988-11-17 1988-11-17 ノズルフラッパ機構

Publications (2)

Publication Number Publication Date
JPH02138501A JPH02138501A (ja) 1990-05-28
JPH0481641B2 true JPH0481641B2 (en]) 1992-12-24

Family

ID=17762583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63290950A Granted JPH02138501A (ja) 1988-11-17 1988-11-17 ノズルフラッパ機構

Country Status (5)

Country Link
US (3) US4934401A (en])
JP (1) JPH02138501A (en])
DE (1) DE3902738C2 (en])
FR (1) FR2639086B1 (en])
GB (1) GB2225133B (en])

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5163463A (en) * 1990-07-19 1992-11-17 Fisher Controls International, Inc. Mechanical flexure for motion amplification and transducer with same
EP0504465A1 (de) * 1991-03-21 1992-09-23 MOOG GmbH Fluidischer Wandler mit Piezo-Antrieb
EP0518524B1 (en) * 1991-05-30 1996-09-04 Hitachi, Ltd. Valve and semiconductor fabricating equipment using the same
US5168189A (en) * 1991-09-18 1992-12-01 Caterpillar Inc. Solderless connector for a solid state motor stack
GB9122739D0 (en) * 1991-10-25 1991-12-11 The Technology Partnership Ltd System for controlling fluid flow
JP2532907Y2 (ja) * 1992-02-10 1997-04-16 動力炉・核燃料開発事業団 幅広パルスノズル
US5203537A (en) * 1992-03-09 1993-04-20 Teledyne Industries, Inc. Piezoceramic valve actuator sandwich assembly and valve incorporating such an assembly
FR2690623B1 (fr) * 1992-04-29 1995-01-20 Chronotec Techsonic Dispositif de contrôle de débit pour systèmes de perfusion.
DE4220177A1 (de) * 1992-06-19 1993-12-23 Marco Systemanalyse Entw Vorrichtung zur Betätigung eines Ventilelementes
US5460202A (en) * 1993-11-22 1995-10-24 Landis & Gyr Powers, Inc. Three-way piezoelectric valve
DE4411569C1 (de) * 1994-04-02 1995-07-20 Itw Dynatec Gmbh Klebetechnik Auftragskopf zur dosierten Abgabe von strömenden Medien
EP0762088A3 (de) * 1995-09-11 1997-11-05 Georg Fischer Rohrleitungssysteme AG Verfahren und Vorrichtung zur Grenzstanderfassung von Flüssigkeiten und Schüttgütern
DE19547149A1 (de) * 1995-12-16 1997-06-19 Marco Systemanalyse Entw Fluidisches Ventil
US6024340A (en) * 1996-12-04 2000-02-15 Active Control Experts, Inc. Valve assembly
US6062256A (en) * 1997-02-11 2000-05-16 Engineering Measurements Company Micro mass flow control apparatus and method
WO1998045633A1 (en) * 1997-04-07 1998-10-15 Mccord Winn Textron Inc. Multi-valve module having a ceramic piezoelectric actuator
US6086041A (en) * 1997-04-07 2000-07-11 Mccord Winn Textron Inc. Multi-valve module having a ceramic piezoelectric actuator
DE19734845C1 (de) * 1997-08-12 1998-11-12 Deutsch Zentr Luft & Raumfahrt Schnellschaltendes Ventil
US6157115A (en) * 1998-10-13 2000-12-05 Nordson Corporation Mechanical amplifier
US6337465B1 (en) * 1999-03-09 2002-01-08 Mide Technology Corp. Laser machining of electroactive ceramics
US6302495B1 (en) 1999-06-04 2001-10-16 Ge Harris Railway Electronics, Llc Railway car braking system including piezoelectric pilot valve and associated methods
US6589229B1 (en) 2000-07-31 2003-07-08 Becton, Dickinson And Company Wearable, self-contained drug infusion device
US6676106B2 (en) * 2000-12-28 2004-01-13 Xerox Corporation Flap structure for electrostatic or magnetic applications and method for making same
DE10161888A1 (de) * 2001-08-14 2003-02-27 Continental Teves Ag & Co Ohg Piezoelektrisch betätigtes Fluidventil
CZ305381B6 (cs) * 2002-01-29 2015-08-26 Sit S.P.A. Ventilová jednotka pro modulaci výtlačného tlaku plynu
RU2283458C2 (ru) * 2002-01-29 2006-09-10 Сит Ла Пречиса С.П.А. Клапанный узел для модулирования давления подачи газа
US7061161B2 (en) 2002-02-15 2006-06-13 Siemens Technology-To-Business Center Llc Small piezoelectric air pumps with unobstructed airflow
US20040040503A1 (en) * 2002-08-29 2004-03-04 Micron Technology, Inc. Micromachines for delivering precursors and gases for film deposition
US20040040502A1 (en) * 2002-08-29 2004-03-04 Micron Technology, Inc. Micromachines for delivering precursors and gases for film deposition
US6888291B2 (en) * 2002-10-31 2005-05-03 The Boeing Company Electrical system for electrostrictive bimorph actuator
US6988706B2 (en) * 2003-12-17 2006-01-24 General Electric Company Piezoelectric microvalve
US7678441B2 (en) * 2005-12-02 2010-03-16 E.I. Du Pont De Nemours And Company Interlayers for laminated safety glass with superior de-airing and laminating properties and process for making the same
JP5708167B2 (ja) * 2011-04-06 2015-04-30 コニカミノルタ株式会社 超音波探触子及び超音波診断装置
PL240787B1 (pl) * 2018-04-11 2022-06-06 Politechnika Bialostocka Piezoelektryczny wtryskiwacz gazowy zwłaszcza do układów zasilania silników spalinowych
CN108679294A (zh) * 2018-07-30 2018-10-19 辰星仪表（成都）有限公司 差分式喷嘴挡板调压机构

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3152612A (en) * 1956-09-28 1964-10-13 Gen Electric Piezoelectric crystal transducer for controlling fluid flow
US3063422A (en) * 1960-06-13 1962-11-13 Joel H Gregowski Electromechanical device
US3286719A (en) * 1963-12-30 1966-11-22 Ling Temco Vought Inc Piezoelectric fluid jet transfer valve
GB1097013A (en) * 1964-03-26 1967-12-29 Plessey Uk Ltd Improved method of making bimorph elements
US3456669A (en) * 1966-10-20 1969-07-22 Fisher Governor Co Piezoelectric transducer
DE2211751A1 (de) * 1972-03-10 1973-09-13 Braun Ag Einspannung eines piezoelektrischen biegestreifens
JPS5728500A (en) * 1980-07-29 1982-02-16 Kureha Chem Ind Co Ltd Ultrasonic wave transducer
US4387318A (en) * 1981-06-04 1983-06-07 Piezo Electric Products, Inc. Piezoelectric fluid-electric generator
US4492360A (en) * 1982-06-07 1985-01-08 The Lee Company Piezoelectric valve
US4545561A (en) * 1982-07-30 1985-10-08 Mcdonnell Douglas Corporation Piezoelectric valve operator
DE3240884A1 (de) * 1982-11-05 1984-05-10 Philips Patentverwaltung Gmbh, 2000 Hamburg Keramisches bistabiles biegeelement
AT380934B (de) * 1983-01-13 1986-07-25 Enfo Grundlagen Forschungs Ag Elektrisch-pneumatischer signalwandler
GB2151434B (en) * 1983-12-02 1987-10-14 Raytheon Co Multi-layered polymer transducer
EP0165407A3 (en) * 1984-04-26 1986-06-18 Nippon Enlarging Color Inc. Flow control valve with piero-electric actuator
JPS60227078A (ja) * 1984-04-26 1985-11-12 Nippon Enraajingu Color Kk 流量制御弁
DE3425290A1 (de) * 1984-07-10 1986-01-16 Atlas Fahrzeugtechnik GmbH, 5980 Werdohl Piezokeramische ventilplatte und verfahren zu deren herstellung
US4617952A (en) * 1984-07-31 1986-10-21 Yamatake-Honeywell Co. Limited Switching valve and an electro-pneumatic pressure converter utilizing the same
DE3434729A1 (de) * 1984-09-21 1986-04-03 Siemens AG, 1000 Berlin und 8000 München Biegeelement aus piezokeramik und verfahren zu seiner herstellung
US4629926A (en) * 1985-10-21 1986-12-16 Kiwi Coders Corporation Mounting for piezoelectric bender of fluid control device
US4769570A (en) * 1986-04-07 1988-09-06 Toshiba Ceramics Co., Ltd. Piezo-electric device
JPS62246667A (ja) * 1986-04-18 1987-10-27 Ube Ind Ltd 圧電バルブ及びその駆動方法
US4768266A (en) * 1986-08-29 1988-09-06 Dataproducts Corporation Method of making an ink jet printer transducer array
EP0262637B1 (en) * 1986-09-29 1995-03-22 Mitsubishi Chemical Corporation Piezoelectric actuator
JPH06191979A (ja) * 1992-12-25 1994-07-12 Yasumiki Osato 生ごみ類の処理装置及びその処理方法

Also Published As

Publication number Publication date
DE3902738C2 (de) 1994-05-05
JPH02138501A (ja) 1990-05-28
DE3902738A1 (de) 1990-05-23
FR2639086B1 (fr) 1993-11-12
US5012835A (en) 1991-05-07
FR2639086A1 (fr) 1990-05-18
US4934401A (en) 1990-06-19
GB2225133A (en) 1990-05-23
GB2225133B (en) 1993-06-02
GB8901966D0 (en) 1989-03-22
US5076314A (en) 1991-12-31

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